Valve improvement for high flow rate piezoelectric pump with PDMS film valves

Abstract A technique of check valve improvement for high frequency and high flow rate piezoelectric pumps is presented. By adding in a blocking edge over polydimethylsiloxane (PDMS) film check valve to modify their deformation pattern, 40%–300% flow rate enhancement and 5–6 kPa output pressure increment were achieved on a bench top testing platform. Experimental results show that the new valve is benefits to design a high efficiency and high outflow piezoelectric pump.