The method of making an all-polymeric planar light path

The present invention discloses a method for manufacturing a planar optical path of the whole polymer, comprising the steps of: (1) the use of UV lithography and deep etching process to obtain the initial master mold, after the copy method of electrochemically deposited nickel metal mold, and then using the microchip the method of making polymer micro plastic structural components; (2) thermal annealing process to segment the part, reducing the roughness of side walls, reducing the scattering loss of light wave transmissions; (3) coating a dielectric material filled polymer , cured to form the core structure of the planar lightwave circuit; (4) a subbing layer with a polymer layer element is bound, the bound layer is then combined with the optical polymeric substrate together to prepare a buried ridge type polymer planar lightwave circuit implementation. Compared to the conventional method for preparing a polymer planar lightwave circuit according to the present invention, it reduces the cost, versatility of the process material.