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A new analysis strategy for CD metrology using rapid photo goniometry method
A new analysis strategy for CD metrology using rapid photo goniometry method
2004
G. Petit
Pierre Barritault
Jerome Hazart
Patrick Chaton
Pierre Boher
Mathieu Luet
Thierry Leroux
Keywords:
Metrology
Fourier optics
Scanning electron microscope
Specular reflection
Goniometer
Optics
Materials science
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