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SINGULAR – A Novel Static Inline PECVD-Deposition Concept for Silicon-Cell Production
SINGULAR – A Novel Static Inline PECVD-Deposition Concept for Silicon-Cell Production
2009
Patrick Binkowska
M. R. Huber
Bernhard Cord
Torsten Dippell
Oliver Hohn
Björn Roos
Keywords:
Silicon nitride
Analytical chemistry
Plasma-enhanced chemical vapor deposition
Materials science
Silicon
Deposition (law)
silicon cell
Optoelectronics
Correction
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