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Radial line slot antenna microwave plasma source mediated conformal doping of non-planar silicon structures
Radial line slot antenna microwave plasma source mediated conformal doping of non-planar silicon structures
2015
hirokazu ueda
piitaa bentozekku
masahiro oka
Keywords:
Planar
Radial line
Slot antenna
Doping
Optics
Conformal map
Ion source
Silicon
Materials science
radial line slot antenna
Optoelectronics
Correction
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