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Qualification of silicon based oxide and nitride films for metal-insulator-metal capacitors
Qualification of silicon based oxide and nitride films for metal-insulator-metal capacitors
2018
N Sharma
M. Hooda
S. K. Sharma
Keywords:
Oxide
Capacitor
Inorganic chemistry
Composite material
Metal-insulator-metal
Materials science
Nitride
Silicon
silicon based
metal insulator metal capacitor
Optoelectronics
Correction
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