Cathodoluminescence spectrum-imaging in the scanning electron microscope using automated stage control

Traditionally, cathodoluminescence spectrum-images have been acquired in the scanning electron microscope by using the microscope scan coils to sequentially deflect the electron beam to each pixel to be probed (Figure 1a). This approach has proven to be highly successful in the microanalysis of a wide range of materials. For example, applications ranging from understanding variations in the alloy concentration of compound semiconductors [1], mapping stress fields in semiconductors and ceramics [2 and 3], studying plasmonic effects in novel structures [4], to evaluating trace impurity distributions in geological minerals [5] have been studied effectively.