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Effect of Sputtering Gas Ions on Thin Film Properties
Effect of Sputtering Gas Ions on Thin Film Properties
2016
Shumpei Miyata
Ryoichi Toyoda
Maki Hashimoto
Takaaki Iijima
Akira Tonegawa
Yoshihito Matsumura
Keywords:
Sputter deposition
Thin film
Sputtering
Ion
Metallurgy
Inorganic chemistry
Materials science
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