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Spectroscopic ellipsometry of TaN x and VN films
Spectroscopic ellipsometry of TaN x and VN films
2004
Jan Mistrik
Koji Takahashi
Roman Antos
Mikio Aoyama
Tomuo Yamaguchi
Y. Anma
Yasuo Fukuda
Mayumi B. Takeyama
Atsushi Noya
Z-T Jiang
S.M. Thurgate
G. van Riessen
Keywords:
Ellipsometry
Dielectric
Transition metal
Analytical chemistry
Materials science
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