Innovative ECDL design based on a resonant MEMS scanner for ultra-fast tuning in the MIR range

Although external cavity diode lasers have become firmly established for their excellent properties for species detection, they have severe limitations in terms of high acquisition rates. In this paper, we present our new ECDL design based on a resonantly driven MEMS scanner. By using the MEMS technology, a defined frequency range can be tuned extremely fast and without mode-hops. This allows scanning frequencies in the high kHz range to be achieved. The results of the characterization of the spectral properties of the MEMS-based system and its use for rapid detection of trace gases are presented.