X-Ray measurements of radiation hard monolithic CMOS sensors at Diamond Light Source

This contribution outlines the results of investigations into the effects of radiation damage in the mini-MALTA depleted monolithic pixel sensor prototype using a micro-focus X-ray beam at Diamond Light Source. The in-pixel photon response was measured for three different pixel design variations: one with the standard continuous $\mathrm{n^-}$ layer layout and standard front-end, and extra deep p-well and $\mathrm{n^-}$ gap designs with a modified front-end. The standard design showed a decrease of 12\% in pixel response after irradiation to 1e15 $\mathrm{n_{eq}/cm^2}$. The two new designs did not show a significant decrease in pixel response after irradiation.