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Hydrogen/Argon Annealing on Al-Doped ZnO Films by Low Temperature Magnetron Direct Current Sputtering
Hydrogen/Argon Annealing on Al-Doped ZnO Films by Low Temperature Magnetron Direct Current Sputtering
2015
Neng-Fu Shih
C. C. Lin
San-Lin Young
Chung-Yuan Kung
Keywords:
Mathematical optimization
Mathematics
Direct current
Sputtering
Doping
Cavity magnetron
Annealing (metallurgy)
Hydrogen
Argon
Analytical chemistry
Optoelectronics
Correction
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