Magnetic, optical and electrical properties of permalloy films by DC magnetron sputtering

Permalloy (NiFe) thin films were prepared by direct current (DC) magnetron sputtering (MS). XRD, EDS, AFM, PPMS, Hall effect Test Station, UV–Vis spectrometer , and spectroscopic ellipsometer (SE) were used to characterize the microstructure, electrical, magnetic and optical properties of the films. Magnetic anisotropy was observed in NiFe films grown on , and -STO substrates, and among them , NiFe/STO showed higher saturation magnetization $${M_{\rm{s}}}$$ = 8.4 emu/g , residual magnetization $${M_{\rm{r}}}$$ = 6.625 emu/g and smaller coercivity $${H_{\rm{c}}}$$ = 28 Oe. Films grown at 300° C exhibit stronger magnetization, smaller sheet resistance ( $${R_{\rm{s}}}$$ ), resistivity ( $${\rho }$$ ), and optical reflectivity ( $${R\%}$$ ) growth relative to room temperature (RT). Greater absorption (A) and smaller reflection at 230 nm . showed better transmittance ( $${T\%}$$ ) at 336 nm. Finally, the characterization results using the a spectroscopic ellipsometer are also given.