Atmospheric Pressure CVD of Antimony Oxides.

Communication: Thin films of Sb2O3 (senarmonite) have been deposited from antimony(III) n-butoxide at atmospheric pressure from 500 to 550 degreesC without the addition of a separate oxygen source. Films are analyzed using SEM (see Figure), EDX, and XRD, which indicates a strong (111) texture. On the other hand, the decomposition of antimony(iii) ethoxide in the same temperature range produces only antimony metal. However, when the deposition temperature is increased to 600 degreesC Sb6O13, is deposited.