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Fabrication of High Aspect Ratio Template for Step And flash Imprint
Fabrication of High Aspect Ratio Template for Step And flash Imprint
2006
C. L. Liao
N-H Chen
J.H. Chen
S. Z. Chen
Fon-Shan Yeh
Keywords:
Aspect ratio (aeronautics)
Fabrication
Composite material
Materials science
Optoelectronics
Correction
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