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8.2: High Performance Oxide Thin Film Transistors Fabricated by Atomic Layer Deposition Process
8.2: High Performance Oxide Thin Film Transistors Fabricated by Atomic Layer Deposition Process
2021
Dedong Han
Huijin Li
Junchen Dong
Xiaobin Zhou
Qi Li
Jingyi Wang
Xing Zhang
Yi Wang
Keywords:
Oxide
Atomic layer deposition
Materials science
Optoelectronics
Thin-film transistor
process
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