2D Species Concentration Mapping of Thermal AP-CVD Reactors for Monitoring, Control and Design

This paper describes progress towards the two-dimensional mapping of chemical species in an atmospheric pressure chemical vapour deposition (AP-CVD) reactor during the deposition process. The approach uses tunable infrared laser absorption spectroscopy to measure line-of-sight optical absorbance data for specific chemical species. 2D distributions can then be obtained by tomographic inversion techniques. The developed techniques will have advantages for monitoring, control and design of reactors.