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Gate Oxide Cleans on Single Wafer Tool
Gate Oxide Cleans on Single Wafer Tool
2007
Philippe Garnier
Tony Vessa
Anne Sophie Larrea
B. Pernet
Y. Gomez
D. Barge
A Torres
B. Tavel
C Henderson
Didier Lévy
Keywords:
Gate oxide
Wafer
Materials science
Electronic engineering
Optoelectronics
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