Substrate temperature effects on the electrical properties of CdS films prepared by chemical spray pyrolysis

Abstract Films of CdS typically 0.3 μm thick, grown on glass substrates at 350 °C, 400 °C and 450 °C by chemical spray pyrolysis (CSP) show n-type resitivities of 10 2 Ω cm at 350 °C and > 10 5 Ω cm at 400 °C and 450 °C respectively. This resistivity increase with temperature is attributed to decreasing amounts of chlorine remaining in these films as a byproduct of the CSP process and is consistent with the known n-type dopant behavior of chlorine in this system.