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A sputtering hollow cathode discharge: modelling and comparison with experiments
A sputtering hollow cathode discharge: modelling and comparison with experiments
2009
Db Diana Mihailova
M. Grozeva
van J Jan Dijk
W.J.M. Brok
van der Jjam Joost Mullen
Keywords:
Sputtering
Optoelectronics
Materials science
Cathode
Correction
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