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Dreiachsiger Beschleunigungssensor in Oberflächenmikromechanik (Surface Micromachined Triaxial Accelerometer)
Dreiachsiger Beschleunigungssensor in Oberflächenmikromechanik (Surface Micromachined Triaxial Accelerometer)
2003
Ralf Reichenbach
Dietrich Schubert
Gerald Gerlach
Keywords:
Electronic engineering
Engineering
Surface micromachining
Accelerometer
Mechanical engineering
triaxial accelerometer
Correction
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