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Evaluation of V 2 O 5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
Evaluation of V 2 O 5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
2016
I.I. Kazadojev
Shane O'Brien
M. Modreanu
Petre Osiceanu
S Somacescu
M Apostolopoulou
N Katsarakis
E. Koudoumas
D. Vernardou
Martyn E. Pemble
Ian M Povey
Keywords:
Thermal
Atomic layer deposition
Plasma
Analytical chemistry
Chemistry
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