Simulation on a deformable mirror actuated by microfluidic elements

Some primary simulation results on a deformable mirror actuated by microfluidic elements are introduced. Thickness of the membrane is determined firstly by the inner pressure of liquid element. The shape change of membrane with single droplet is analyzed. In a deformable mirror model that includes 91 liquid actuation units, the calculation result of several key points shows the mirror deformation capability. Some unfavorable phenomena in the simulation, such as the fragmentation and local outspread of liquid element, are also introduced because they are helpful for further design.