100 kHz MEMS Vibratory Gyroscope

The behavior of MEMS rate gyroscopes depends on the sensor's resonance frequency f 0 . Key features like robustness against external vibrations and ease of integration can be optimized by increasing f 0 . We designed and fabricated a device with f 0 =100 kHz for experimental and theoretical investigation of MEMS vibratory gyroscopes with increased f 0 . The frequency of 100 kHz is significantly above the typical f 0 of current gyroscopes which is in the range of 10 kHz to 30 kHz. Measurements prove that key parameters that are theoretically derived from a 15 kHz reference model can be scaled to 100 kHz with good accuracy. It is shown that the increase of f 0 to 100 kHz has-on the one hand-design trade offs like a much lower sensitivity and higher quadrature and-on the other hand-major advantages like the significantly improved vibration robustness.