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Nanoporous thin film fabrication via magnetron sputtering and O2 plasma ashing process
Nanoporous thin film fabrication via magnetron sputtering and O2 plasma ashing process
2018
S. H. Han
S. Hwang
S.H. Hwang
S. W. Jang
Keywords:
Sputter deposition
Plasma ashing
Thin film
Materials science
Nanoporous
Fabrication
Optoelectronics
o2 plasma
Ashing
Correction
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