Alignment and Bonding of Silicon Mirrors for High-Resolution X-Ray Optics

2019 
How to align and bond sub-arc second silicon mirrors? (1) Description of the alignment and bonding process. (2) Technical challenges and advances in aligning and bonding precise silicon mirrors. (a) Precise mirror placement (b) Measurement of focusing (c) Method of spacer adjustment (d) Bonding distortion and displacement (e) Co-alignment and bonding of subsequent mirrors.
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