Old Web
English
Sign In
Acemap
>
Paper
>
Removal of Surface Damage from Focused Ion Beam using Plasma Cleaner
Removal of Surface Damage from Focused Ion Beam using Plasma Cleaner
2006
D.-S. Ko
Ym Park
S. D. Kim
Y Kim
Keywords:
Analytical chemistry
Ion beam
Focused ion beam
Plasma cleaning
Ion beam deposition
Materials science
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]