A high-dynamic range (HDR) back-side illuminated (BSI) CMOS image sensor for extreme UV detection
2012
This paper describes a back-side illuminated 1 Megapixel CMOS image sensor
made in 0.18um CMOS process for EUV detection. The sensor applied a so-call
"dual-transfer" scheme to achieve low noise, high dynamic range. The EUV
sensitivity is achieved with backside illumination use SOI-based solution. The
epitaxial silicon layer is thinned down to less than 3um. The sensor is tested and
characterized at 5nm to 30nm illumination. At 17.4nm targeted wavelength, the
detector external QE (exclude quantum yield factor) reaches almost 60%. The
detector reaches read noise of 1.2 ph- (@17.4nm), i.e. close to performance of EUV
photon counting.
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