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Influence of thermo-processing upon the structure of gold thin films from the combinations: TiWAu and Ta-TiWAu
Influence of thermo-processing upon the structure of gold thin films from the combinations: TiWAu and Ta-TiWAu
1989
S. Rau
G. Popovici
Keywords:
Thin film
Annealing (metallurgy)
Crystal structure
Composite material
Integrated circuit
Metallizing
Tantalum
Materials science
Electrical connection
Mineralogy
Deposition (law)
Depot
Correction
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