Laser-based plasma sources at 6.6 and 60 nm
2013
Potential high power laser-based xenon and terbium plasma sources are identified based on the reflectivity profiles of the available LaN/B4C, LaN/B, and Al/Yb/Sio multilayer mirrors for applications such as surface processing and semiconductor industry.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
5
References
0
Citations
NaN
KQI