Study on structural and optical properties of TiO 2 ALD coated silicon nanostructures

Structural and optical properties of TiO2 ALD coated silicon nanostructures were investigated. The morphology and chemical composition of TiO2 coated silicon nanopillars and porous silicon were studied by using methods of scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX). Optical characteristics were studied using measurements of reflectance and luminescence spectra. Detailed analysis of morphological features and photoluminescence mechanisms were provided. Peculiarities of reflectance spectra were discussed. It was shown the possible application of these structures as antireflectance coatings.