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6PM1-C-1 DLC coating on a micro trench pattern by bipolar PBII
6PM1-C-1 DLC coating on a micro trench pattern by bipolar PBII
2013
Yuki Hirata
Wonsoon Park
Hayato Shimozono
Junho Choi
Takahisa Kato
Keywords:
Coating
Trench
Materials science
Composite material
dlc coating
Correction
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