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Above CMOS processing of MEMS
Above CMOS processing of MEMS
2005
Ann Witvrouw
A. Mehta
Agnes Verbist
B. Du Bois
S. Van Aerde
J. Ramos-Martos
J. Ceballos
A. Ragel
J.M. Mora
Lagos
A. Arias
J.M. Hinojosa
J. Spengler
Christina Leinenbach
Tino Fuchs
Silvia Kronmueller
Keywords:
CMOS
Microelectromechanical systems
Electronic engineering
Materials science
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