Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering

In this article, we report the fabrication and characterization of molybdenum (Mo) thin films on soda-lime glass substrate grown by reactive RF magnetron sputtering for Cu(In,Ga)Se 2 thin film solar cells. It was found that the growth parameters, such as argon flow rate, RF power, bi-layer of Mo thin films and substrate temperature, have significant influences on properties of Mo films. As the argon flow rate was increased, the sheet resistance of Mo films increase, and the strain were changed from tensile to compressive. Higher RF power leads to a decrease on sheet resistance, and the optimal thickness and sheet resistance are 1 µm and 0.2 Ω/□. In addition, our experimental results proved that the increase of substrate temperature will lead to better adhesion of Mo thin film with glass substrate, and lower sheet resistance (0.11∼0.14 Ω/□).