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Radical Oxidation on Ultra Pure Silicon Surface
Radical Oxidation on Ultra Pure Silicon Surface
2006
Kazumasa Kawase
Masaaki Higuchi
Tomoyuki Suwa
Hiroshi Umeda
Masao Inoue
Akinobu Teramoto
Takeo Hattori
Shigetoshi Sugawa
Tadahiro Ohmi
Keywords:
Materials science
Silicon
Inorganic chemistry
radical oxidation
Photochemistry
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