Experimental study of Ti/Pt thin film heater and temperature sensors on Si platform

Thin film Ti/Pt heaters and temperature sensors were designed and fabricated to provide controlled heating of meandered microchannels realized on the opposite side of the Si platform. Ti/Pt heaters and temperature sensors were fabricated simultaneously by DC sputtering on SiO 2 /Si substrate. Annealing temperature in the range 400–700°C was found to influence significantly the sheet resistance and consequently the final resistance of deposited Ti/Pt layers. Measured temperature coefficient of resistance for temperature sensors and heaters was between 1440 and 1700 ppm. Improved temperature response and heating up to 250°C with 27% decrease of power consumption was obtained by Pyrex cavity insulation.