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Low temperature precursors for the metal organic chemical vapour deposition of transparent conducting oxides
Low temperature precursors for the metal organic chemical vapour deposition of transparent conducting oxides
2011
Thomas Wildsmith
Michael S. Hill
Andrew L. Johnson
Kieran C. Molloy
Andrew J. Kingsley
Keywords:
Chemical vapor deposition
Metalorganic vapour phase epitaxy
Inorganic chemistry
Atomic layer deposition
Organic chemistry
Metal
Materials science
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