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Piezoelectric actuators, next driver for MEMS market?
Piezoelectric actuators, next driver for MEMS market?
2017
M. Allain
Fabrice Casset
B. Desloges
C. Dieppedale
S. Fanget
G. Le Rhun
Stephane Nicolas
Keywords:
Actuator
Electrical engineering
Piezoelectricity
Microelectromechanical systems
Engineering
piezoelectric actuators
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