Dual strained channel CMOS in FDSOI architecture: New insights on the device performance

We report an original Dual Strained Channel On Insulator (DSCOI) Fully Depleted CMOS architecture by co-integrating nFETs on sSOI and pFETs on Si/c-SiGe/(s)SOI with a TiN/HfO 2 gate stack (EOT= 1.15 nm) and down to 40 nm gate lengths. We demonstrate for the first time large gains for transconductance (up to +125%) and mobility (+100%) even for short channel pFETs. This enables us to improve the ON(OFF) pFETs trade-off (I ON + 23% for a given I OFF = 100 nA/μm), and thus to obtain similar I ON for n and pFETs (∼650 μA/μm at V DD = 1 V). Meanwhile, thanks to a channel material/strain engineering, the threshold voltages are adjusted (V th ∼ ±0.2 V) for high performance (HP) CMOS with a single mid-gap metal gate. Extracted interface trap densities (N T = 5―8.5 x 1017 cm ―3 eV ―1 ) using low frequency noise indicate the excellent integrity of the TiN/HfO 2 stack when compared to SOI reference samples.