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Numerical Study of Heating Structure in Cold-Wall MOCVD Reactor by Induction Heating
Numerical Study of Heating Structure in Cold-Wall MOCVD Reactor by Induction Heating
2019
Lili Zhao
Zhiming Li
Jincheng Zhang
Ligen Lu
Yunqiu Guo
Lansheng Feng
Keywords:
Induction heating
Metallurgy
Metalorganic vapour phase epitaxy
Materials science
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