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Study optical properties of the thin HfO2 coatings deposited by DC reactive magnetron sputtering
Study optical properties of the thin HfO2 coatings deposited by DC reactive magnetron sputtering
2021
S. Rabadzhiyska
M. Ormanova
S Valkov
N. Ivanov
P. Terziyska
K. Ivanov
Peter Petrov
Keywords:
reactive magnetron
Sputtering
Optoelectronics
Materials science
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