Up to 1700nm broadband high-efficiency surface-illuminated Ge/Si photodiode with microhole array

We demonstrate a 10Gb/s CMOS-compatible surface-illuminated Ge/Si Photodiode integrated with photon-trapping microhole arrays with broadband high efficiency up to 1700nm. The Ge/Si photodiode has >80% and >73% EQE at 1310nm and 1550nm, respectively.