Single‐target sputter deposition, post‐processing and electron spectroscopy of perovskite superconductor thin films

Thin films of Y‐Ba‐Cu‐O superconductors were grown using a single‐target DC diode sputtering technique. A variety of substrates were employed, including quartz, alumina, MgO, and strontium titanate. As‐deposited films were amorphous. Formation of the superconducting structure was accomplished by post‐deposition high‐temperature anneals in oxygen. Deposition parameters leading to superconducting films from a single mixed‐oxide target are discussed. Electron spectroscopy has been employed to non‐destructively determine that the surface of the films are oxygen depleted, which may contribute to the high contact resistance measured in these films.