Telephoto-lens-based Optical Differentiation Wavefront Sensor for freeform metrology

2021 
We report an Optical Differentiation Wavefront Sensor based on a telephoto lens system and binary pixelated filters. It provides a five-fold reduction in the system length compared to a 4f system with identical effective focal length. Measurements of phase plates with this system are compared to measurements performed with a commercial low-coherence interferometer. The telephoto-lens-based system can measure wavefronts with accuracy better than λ/10 Root Mean Squared (RMS) at λ=633 nm. Experimental investigation shows that the system has a high tolerance to components alignment errors.
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