Old Web
English
Sign In
Acemap
>
Paper
>
An X-ray topographic study of beta-SiC films on Si substrates
An X-ray topographic study of beta-SiC films on Si substrates
1987
Mohammad H. Fatemi
P. E. R. Nordquist
Keywords:
Thermal expansion
Thin film
Combustion chemical vapor deposition
Single crystal
Crystallography
Dislocation
Silicon carbide
Nuclear magnetic resonance
Physics
X-ray
Correction
Cite
Save
Machine Reading By IdeaReader
2
References
0
Citations
NaN
KQI
[]