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FRACTURE PREDICTION OF SINGLE CRYSTAL SILICON MEMS UNDER MULTI-AXIAL LOADING
FRACTURE PREDICTION OF SINGLE CRYSTAL SILICON MEMS UNDER MULTI-AXIAL LOADING
2008
Alissa M. Fitzgerald
D. M. Pierce
Carolyn D. White
Brent M. Huigens
J. W. Eaton
Keywords:
Optoelectronics
Single crystal
Microelectromechanical systems
Silicon
Materials science
single crystal silicon
Composite material
multi axial
Correction
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