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Vapor Deposition of TiO2
Vapor Deposition of TiO2
1968
Masami Yokozawa
Hitoo Iwasa
Iwao Teramoto
Keywords:
Hybrid physical-chemical vapor deposition
Ion plating
Analytical chemistry
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Plasma processing
Plasma-enhanced chemical vapor deposition
Deposition (phase transition)
Physics
Pulsed laser deposition
Correction
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