Probing diffusion barrier integrity on porous silica low-k thin films using positron annihilation lifetime spectroscopy

The technique of positron annihilation lifetime spectroscopy (PALS) has been used to investigate the continuity and thermal stability of thin barrier layers designed to prevent Cu atom diffusion into porous silica, low-dielectric constant (k) films. Nanoglass™ K2.2-A10C (A10C), a porous organosilicate film, is determined to have interconnected pores with an average tubular-pore diameter of (6.9 ± 0.4) nm. Cu deposited directly on the A10C films is observed to diffuse into the porous structure. The minimum necessary barrier thickness for stable continuity of Ta and TaN layers deposited on A10C is determined by detecting the signal of positronium (Ps) escaping into vacuum. It is found that the 25 nm thick layers do not form continuous barriers. This is confirmed by the presence of holes observed in such films using a transmission electron microscope. Although 35 nm and 45 nm Ta and TaN layers perform effectively at room temperature as Ps barriers, only the Ta-capped samples are able to withstand heat treatm...