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Heavy Ion Micro‐machining at the Tandar Laboratory
Heavy Ion Micro‐machining at the Tandar Laboratory
2007
M. E. Debray
M Fischer
A.J. Kreiner
A. Lamagna
M. Davidson
J. Davidson
D. Minsky
A. A. Burlon
H. Somacal
Keywords:
Surface micromachining
Ion beam
Analytical chemistry
Ion
Machining
Materials science
Optoelectronics
heavy ion
Correction
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