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Plasma diagnostics of carbon-HiPIMS for depositing DLC film (2)
Plasma diagnostics of carbon-HiPIMS for depositing DLC film (2)
2021
Takayuki Ohta
Jo Matsushima
Akinori Oda
Hiroyuki Kousaka
Keywords:
High-power impulse magnetron sputtering
Amorphous carbon
Diamond-like carbon
Materials science
Plasma diagnostics
Optoelectronics
Carbon
Correction
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